FIELD: microscopes for reflected light, in particular, for testing articles of microelectronics during manufacturing. SUBSTANCE: device has five members, first of which is single positive lens, second is lens which is designed as glued negative and positive lenses, third member is positive lens, fourth member is meniscus which concavity is directed towards image, fifth member is glued from meniscus which concavity is directed to object, and biconcave lens. EFFECT: increased focal length. 3 tbl, 1 dwg
Authors
Dates
1998-02-10—Published
1992-07-09—Filed