APPARATUS FOR DEPOSITION OF POROUS COATING ONTO TAPE Russian patent published in 1997 - IPC

Abstract RU 2087588 C1

FIELD: application of coatings. SUBSTANCE: vacuum deposition apparatus contains vacuum chamber, evaporator, upper and lower guiding rolls and deviating rolls for tape transportation. As a result, wide tape (width larger than 150 mm) acquires columnar structure of coating with maximum porosity and no wrinkle-formation. Such result is caused by that working sections of tape are arranged in such a way that dip angle of flux onto foil is equal to 40-60 deg., whereas, on inlet and outlet of deposition region, dip angle equals up to 10 deg. Cylindrical surface of guiding rolls has chevron-shaped recesses. EFFECT: improved quality of coatings. 2 cl, 2 dwg

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RU 2 087 588 C1

Authors

Rjazantsev Sergej Nikolaevich[Ua]

Koshelevskij Viktor Fadeevich[Ua]

Dates

1997-08-20Published

1996-04-03Filed