FIELD: test and measuring equipment. SUBSTANCE: device has two identical open-capacitance sensors 3, 4. One of them is placed on surface of check specimen with clearance between sensor electrodes and specimen surface equal to 5-10 mcm. Sensors are connected to controlled square-pulse generator 1. Amplitude of square pulses is 5-10 V, and repetition frequency ranges from 2.5 kHz to 2,5 MHz. Sensors are also connected to comparison unit 5 which is part of measurement processing and recording unit. The latter includes current-to-voltage converter 6, frequency correction unit 7, amplifier 8, low-pass filter 9, solver 10, digital voltmeter 11, and code-to-resistance converter. EFFECT: efficient process of measurement. 3 cl, 4 dwg
