METHOD OF MEASURING THE STEEP-WALLED SHELVES Russian patent published in 1997 - IPC

Abstract RU 2095749 C1

FIELD: measurement technology; measurement of spray-coating thickness; determination of etching depth in polished surfaces in electronics and mechanical engineering. SUBSTANCE: method consists in measuring the fractional part of shift of interference bands of shelf, moistening the shelf walls with liquid and measuring the entire part of interference band shift on continuous transition of surface from top bottom. EFFECT: higher truth and extended range of measurements. 2 dwg

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RU 2 095 749 C1

Authors

Shestakov N.P.

Dates

1997-11-10—Published

1994-09-30—Filed