OPTOINTEGRAL DIGITAL SENSOR OF LINEAR MICROMOTIONS Russian patent published in 1998 - IPC

FIELD: measurement technology. SUBSTANCE: sensor has optically connected measuring and immovable rasters with equal width of raster elements and relation of measuring raster period to period of immovable raster equal to cosα, where α is angle of relative angular shift of rasters. Rasters are made in the form of waveguide structures of immovable and measuring optointegral modules. Immovable module has optically and series-connected waveguide splitter provided with one input and 2N outputs, where N is digit capacity of sensor, and waveguide raster consisting of 2N three-dimensional waveguides with refraction index of n₁. Measuring module is connected to object being measured. It has coding waveguide raster including three-dimensional wave guide sections with refraction index of n₂ exceeding n₁. Waveguide sections are positioned in compliance with binary code. Waveguide splitter input of immovable module serves as radiation delivery input, and waveguide raster outputs of the same module are sensor output. EFFECT: reduced dimensions of sensor. 1 tbl, 5 wdgo