DEVICE FOR EXPOSITION OF OBJECT TO BEAM OF CHARGED PARTICLES Russian patent published in 1998 - IPC

FIELD: electrical engineering, in particular, electromagnetic scanning equipment. SUBSTANCE: device has scanning and analysis assembly which is designed as beam scanning electromagnet, detector of analyzed beam, which is designed as collector converter, excitation current generator, which has two inputs and two outputs. First input of generator is connected to output of scanning electromagnet programmer; second input of generator is connected to output of analysis programmer. First output of generator is connected to input of scanning electromagnet; second output is connected to first input of spectrum detector. Second input of spectrum detector is connected to output of detector of analyzed beam. Detector is located in scanning plane after output window of vacuum chamber aside from central axis of scanning electromagnet. EFFECT: increased functional capabilities. 2 dwg