FIELD: electrical engineering. SUBSTANCE: method involves ion deposition of resistive material (tantalum, stainless steel, and so on) in environment of active and noble gases in magnetic field under condition that ratio of partial pressure of active gas to partial pressure of noble gas is 1 to 10, and density of ion current is within range of 200-220 mA/cm2. EFFECT: increased reliability of electric heaters.
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Authors
Dates
1999-11-20—Published
1997-11-10—Filed