METHOD AND DEVICE FOR PRECISE CONTACTLESS MEASUREMENT OF DISTANCE BETWEEN SURFACES Russian patent published in 2000 - IPC

FIELD: optical instruments. SUBSTANCE: method is based on triangulation and involves regulation of angle between surface and measuring beam produced by laser. Light spot which is produced on surface should smaller to increase resolution. In practice, such measuring regions cause interference effects, which distort measured signal as noise. Goal of invention is achieved by optical splitting of light beam reflected or dissipated by surface into two partial beams with approximately identical distribution of intensity surfaces in perpendicular to beam direction. Then both light beams are detected by means of photo diodes, so that roughness parameters are measured using these signals. EFFECT: improved processing of produced signals. 7 cl, 2 dwg