DETECTOR TESTING SURFACE OF OBJECT AND PROCESS OF SURFACE TEST Russian patent published in 2002 - IPC

FIELD: identification of surface characteristics of defects of structure. SUBSTANCE: detector incorporates light- emitting module 51 which emits at least one light beam ( 6, 6′, 6″ ) and light-receiving module 52 which includes one light detector 15, 16, 20 as minimum. Rotary polyhedral mirror 2 is positioned in focus of parabolic mirror 1. Light beam 6 from laser 3, 4 is directed on to mirror 2 with the aid of telecentric lens. This lens directs forward and backward beams along one optical axis. In this case parabolic mirror 1 directs deflected light beam (6, 6′, 6″) at constant angle with respect to symmetry axis 7 of parabolic mirror 1 along line of scanning of object 10 and diffusively reflected light beam after deflection from common path of light beam goes to processing unit. EFFECT: potential for measurement of various surface characteristics, including surface profile, in real time. 26 cl, 9 dwg