MONOLITHIC MULTILAYER ACTUATING PIEZOID AND ITS MANUFACTURING PROCESS Russian patent published in 2001 - IPC

FIELD: piezoelectricity. SUBSTANCE: proposed monolithic actuating piezoid is made of stoichiometric PZT-ceramic with low concentration of dope at A- positions and with silver and palladium containing electrodes. Added to type PZT powder are stoichiometric excess of heterovalent rare-earth metal up to total content of 1 to 5 mole percent and 1 to 5 mole percent of stoichiometric excess of lead oxide more. Raw films carrying deposited electrode layers are laminated and sintered in oxidizing environment at maximal temperature t = 1130 C for 30 to 120 minutes. Proposed process ensures optimal grain size and optimal piezoelectric properties irrespective of dope concentration at B-positions in ceramic . Actuating piezoids capable of functioning at high operating temperatures up to 150 C can be produced by using proposed process. EFFECT: improved mechanical properties of piezoid at high piezoelectric properties. 5 cl, 3 dwg