FIELD: measurement technology; absolute-pressure capacitance-type sensors. SUBSTANCE: proposed sensor has hermetic housing, two diaphragms each of which is closed with cover, strip bracket fitted in center portion of housing for securing two fixed electrodes, movable electrodes each of which is connected with rod of respective diaphragm, pipe union and pipe union-cock fitted in one of covers and additional pipe union-cock made in housing and connected with pipe union by means of gas discharge line; adjustment is performed through change of capacitance gap between each movable and respective fixed electrode by moving the strip bracket with the aid of rocker arm system located outside sensor housing and signal at sensor output is checked at this. First pressure equal to internal pressure of sensor is built up in receiving chamber by closing the pipe union-cock and opening the additional pipe union-cock. EFFECT: enhanced accuracy, improved thermal stability and extended range of measurement of absolute pressure. 3 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD OF ADJUSTING CAPACITIVE PRESSURE GAUGE | 2001 |
|
RU2239806C2 |
CAPACITIVE PRESSURE TRANSDUCER | 0 |
|
SU1615581A1 |
CAPACITIVE PRESSURE PICKUP | 0 |
|
SU1696920A1 |
DEVICE FOR MEASURING ABSOLUTE OR DIFFERENTIAL PRESSURE | 0 |
|
SU1812456A1 |
VARIABLE-CAPACITANCE TRANSDUCER | 0 |
|
SU1500887A1 |
CAPACITANCE-TYPE PRESSURE DIFFERENTIAL SENSOR | 2001 |
|
RU2237874C2 |
CAPACITIVE DIFFERENTIAL-PRESSURE GAGE | 0 |
|
SU1796934A1 |
PRESSURE TRANSDUCER | 2000 |
|
RU2177146C1 |
PIEZORESONANCE PRESSURE PICKUP | 0 |
|
SU1712803A1 |
INTEGRAL GAUGE OF ABSOLUTE PRESSURE | 2011 |
|
RU2470273C1 |
Authors
Dates
2002-02-20—Published
2000-03-07—Filed