INTEGRAL GAUGE OF ABSOLUTE PRESSURE Russian patent published in 2012 - IPC G01L9/12 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measurement equipment. An integral gauge of absolute pressure comprises a conducting silicon membrane with a rigid centre, the first and second glass liners, connected rigidly with the silicon membrane. In the first glass liner there is a receiving hole. Between the first glass liner and the silicon membrane there is an inlet chamber. Between the second glass liner and the silicon membrane there is a vacuumised chamber, on the inner surface of the second glass liner there is the first and second fixed conducting electrodes applied. The first electrode is arranged oppositely to the movable rigid centre on the silicon membrane. The second electrode is arranged oppositely to the non-deformable part on the silicon membrane. The first and second fixed conducting electrodes are connected to inputs of an electronic unit. In the rigid centre of the silicon membrane at the side of the input chamber there is a groove etched in the form of a truncated pyramid, side walls of which are parallel to side walls of the rigid centre. The thickness of a partition formed by side walls of the truncated pyramid and the rigid centre is arranged as equal to the thickness of the flexible part of the silicon membrane.

EFFECT: elimination of impact of linear accelerations to gauge sensitivity.

2 cl, 2 dwg