FIELD: microelectronics and electronic engineering; film resistor manufacture. SUBSTANCE: proposed method for trimming film resistors depends on action of electric-arc discharge on resistive film; process involves time-varying trimming cycles whose length depends on number of pulses in burst according to mathematical expression. As an alternative discharge pulse length may be reduced according to mathematical expression as soon as relative deviation of DS value is attained. EFFECT: enhanced trimming speed and precision compared with prior art. 4 cl, 5 dwg, 2 tbl
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Authors
Dates
2002-09-27—Published
2001-06-26—Filed