PRESSURE SENSOR WITH FREQUENCY OUTPUT Russian patent published in 2002 - IPC

FIELD: information and measurement technology; measurement of pressures and pressure differentials of liquid and gaseous media. SUBSTANCE: pressure sensor includes self-excitation system and sensitive element in form of oscillatory system 23 performing transversal oscillations and dividing the interior of sensitive element into two communicating working chambers 21 and 22; walls of working chambers which are opposite to oscillatory system are made in form of barometric sensitive diaphragms 11 which may be provided with flexural centers 19 and 20. Interior of sensitive element is filled with inert gas. Sensor is provided with thermocorrecting sensor made in form of self-excited system with sensitive element in form of oscillatory system dividing interior of sensitive element into two chambers. Sensitive element may be made in form of two oscillatory systems: one system forms pressure sensor and other system forms thermocorrecting sensor. EFFECT: possibility of measuring pressures within wide range irrespective of chemical composition and density of media; enhanced accuracy and reliability. 10 cl, 12 dwg