FIELD: chemical engineering. SUBSTANCE: invention relates to and purification of perfluorinated products isolated from initial mixture containing a multitude of compounds via azeotropic and extraction distillation. In particular, tetrafluoromethane is separated from nitrogen trifluoride using entraining agents in the form of top distillate, whereas nitrogen trifluoride is withdrawn in the form of bottom product. Entraining agents are selected from group including hydrocarbons, fluorocarbons, chlorofluorocarbons, chlorohydrocarbons, hydrogen chloride, and oxides. EFFECT: increased degree of recovery and purity of separated products. 24 cl, 7 dwg, 9 tbl, 7 ex
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