METHOD FOR PRODUCTION OF JET PRINTING HEAD, PRINTING HEAD FOR EJECTION OF LIQUID AND MULTIDENSE LEVEL MASK Russian patent published in 2004 - IPC

FIELD: jet thermoprinting, in particular, method and device for production of precise polymeric jets containing epoxide, polyimide or other photoresistive material of negative action with employment of the methods for direct formation of image. SUBSTANCE: the method includes the stages of application of a pile of thin-film layers onto the surface of the semiconductor substrate, application of a single layer of slow-cross-linking polymer on the pile of the thin-film layers, irradiation of the slow-cross-linking polymer by a low dose of electromagnetic energy sufficient for precuring and cross-linking of slow-cross-linking polymer to the desired depth, for transfer of the jet image and irradiation by a high of electromagnetic energy sufficient for overcuring and cross-linking of slow-cross-linking polymer, with the exception of the place where the chamber for the liquid cavity is positioned, for transfer of the image of the liquid cavity, and includes the development of those parts of the single layer of slow-cross-linking polymer, where the transferred image of the jet is located with determination of the location of the respective jet port, and the transferred image of the liquid capacity is located with determination of the location of the respective port of the liquid cavity. EFFECT: reduced cost of the printing head and cost of its manufacture, enhanced service life of it. 10 cl, 31 dwg