METHOD OF VIDEO MEASURING OF FILM THICKNESS Russian patent published in 2004 - IPC

FIELD: measuring engineering.

SUBSTANCE: method includes the illumination of the study surface with a light beam, formation of the interferometric pattern composed of two systems of the interferometric fringes, displacement of the surface in the direction of the incident light, fixing the direction of the displacement of the interferometric fringes, and determination of the direction of bending relatively to the system of the interferometric fringes in the region of the base not covered with the film. The distributions of the radiance intensity are determined in various sections of the interferometric field lateral to the interferometric fringes in the region of the film and base images. In the region of the system of interferometric fringes the minimum value of the radiance intensity is measured, and its space (linear) position and nearest position in the region of the film and base images is recorded. The values of intensity minimums obtained are used for the determination of bending values and distance between the fringes. The thickness of the film is determined from the data obtained.

EFFECT: enhanced accuracy of the measurements.

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