FIELD: vacuum engineering.
SUBSTANCE: method includes static calibration of the leak detector, filling the mass spectrometer chamber rarified gas mixture with the test gas, extracting the electrical signal from the partial pressure of the test gas, recording the signal, and calculating the gas leak flow rate.
EFFECT: enhanced sensitivity.
2 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD AND DEVICE FOR FLUID TIGHTNESS TESTING OF ARTICLES | 1991 |
|
RU2025681C1 |
PROCESS OF TIGHTNESS TEST | 1998 |
|
RU2174675C2 |
0 |
|
SU1670448A1 | |
APPARATUS FOR TESTING ARTICLES FOR FLUID-TIGHTNESS | 0 |
|
SU1504527A1 |
LEAK DETECTOR | 2003 |
|
RU2240524C1 |
METHOD OF TESTING ARTICLES FOR AIR-TIGHTNESS | 0 |
|
SU808892A1 |
MASS-SPECTROMETRIC LEAK DETECTOR | 0 |
|
SU1587354A1 |
0 |
|
SU247597A1 | |
METHOD OF TESTING AIR-TIGHTNESS OF PRODUCTS | 0 |
|
SU1651119A1 |
VACUUM UNIT | 0 |
|
SU1281946A1 |
Authors
Dates
2004-11-10—Published
2002-05-06—Filed