METHOD AND DEVICE FOR TESTING PRESSURE-TIGHTNESS Russian patent published in 2004 - IPC

Abstract RU 2239807 C2

FIELD: vacuum engineering.

SUBSTANCE: method includes static calibration of the leak detector, filling the mass spectrometer chamber rarified gas mixture with the test gas, extracting the electrical signal from the partial pressure of the test gas, recording the signal, and calculating the gas leak flow rate.

EFFECT: enhanced sensitivity.

2 cl, 1 dwg

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RU 2 239 807 C2

Authors

Dates

2004-11-10—Published

2002-05-06—Filed