METHOD AND DEVICE FOR FLUID TIGHTNESS TESTING OF ARTICLES Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: method involves the steps of: evacuating a test chamber containing an article subjected to a pressure test with a test gas with the aid of a high vacuum pump, analyzing a gas sample with the aid of a mass-spectrometer. Evacuation and introduction of the sample into an analyzer are performed by a two-stage turbomolecular pump, the test gas having a low ionization potential. The gas sample is ionized in an auxiliary chamber and compressed in a second auxiliary chamber prior to introducing it into the analyzer thus performing soft ionization of the gas sample under pressure close to atmospheric one. EFFECT: enhanced reliability. 2 cl, 1 dwg