FIELD: investigating fluid-tightness of structures.
SUBSTANCE: leak detector has mass-spectrometer analyzer provided with ion source and ion receiver, high-vacuum pump, first and second valves, first and second control valves, inlet and outlet pipelines, and means for supplying, control and indication interconnected through pipelines. The inlet pipeline is connected with the mass-spectrometer analyzer through the first control valve. The analyzer is connected to the inlet of the high-vacuum pump whose outlet is connected with the outlet pipeline through the first valve and to the mass-spectrometer analyzer through the second control valve. The inlet and outlet pipelines are interconnected through the second valve.
EFFECT: enhanced sensitivity.
2 dwg
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Authors
Dates
2004-11-20—Published
2003-07-15—Filed