METHOD FOR CONTROLLING QUALITY OF MANUFACTURE OF MICRO-MECHANICAL DEVICES Russian patent published in 2005 - IPC

Abstract RU 2244271 C1

FIELD: measuring technologies.

SUBSTANCE: method is used for devices containing moving element, electrostatic force indicator and moveable element displacement sensor. Method includes forming of harmonic signals at input of force set-point device and measuring harmonic signals at output of displacement indicator. Amplitude-frequency characteristic of micro-mechanical device is determined by calculating relation of amplitude of second harmonics at output of displacement sensor to signal amplitude at input of force set-point device.

EFFECT: higher precision.

2 cl, 6 dwg

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RU 2 244 271 C1

Authors

Nekrasov Ja.A.

Moiseev N.V.

Dates

2005-01-10—Published

2003-05-13—Filed