METHOD FOR MEASUREMENT OF CLEARANCE BETWEEN ELECTRODES AND MOVING MASS OF MICROMECHANICAL DEVICE AND DEVICE FOR ITS REALISATION Russian patent published in 2008 - IPC G01B7/14 

Abstract RU 2338997 C2

FIELD: electricity.

SUBSTANCE: voltage is changed at least at one of the electrodes. Movable mass (MM) shifts determined by these voltage variations are measured by means of measuring the change of capacity between one of the electrodes and MM. Clearance is determined using shift-voltage dependence, got by calculation from following expression: M(α, d, u)+cα = 0, where: M - moment, created by electric field when voltage is supplied to one of the electrodes; α, d - tilt angle and clearance between MM and electrodes; c - resilient suspension stiffness of MM. Device for clearance measurement contains computing device which inputs are connected with voltage source and capacity-voltage converter outputs.

EFFECT: increase of clearance accuracy measurement.

2 cl, 6 dwg

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RU 2 338 997 C2

Authors

Nekrasov Jakov Anatol'Evich

Beljaev Jakov Valer'Evich

Dates

2008-11-20Published

2006-07-13Filed