FIELD: micro-mechanics; measuring techniques.
SUBSTANCE: method can be used in micro-mechanical vibration-type gyroscopes in which gyroscopes Coriolis acceleration, induced at turns, results in movement of movable mass. When measuring movements (Δx) of movable mass of axis of secondary oscillations of electrodes of differential capacitive transducer, disposed along axis of secondary oscillations, and measuring of current difference, flowing through those electrodes, product of currents, flowing through those electrodes, is measured additionally, and movement of movable of mass of micro-mechanical gyroscope is calculated from ratio of Δx=UωεSΔI/ПI, where ΔI and ПI are difference and product of currents correspondingly, U and ω are amplitudes and angular frequency of voltage at electrodes, S is square of electrodes. Device for measuring movement of movable mass has differential capacitive transducer, two trans-resistive amplifiers which have inputs connected with outputs of differential capacitive transducer, instrumental amplifier which has inputs connected with outputs of trans-resistive amplifiers, alternative voltage generator which has output connected with movable mass, demodulator which has first input connected with output of differential amplifier and the second input is connected with alternative voltage generator through phase shifter, additional multiplier which has inputs connected with outputs of trans-resistive amplifiers, lower frequency filter which has input connected with output of multiplier, and divider which has one input connected with output of demodulator and the other input is connected with output of lower frequency filter.
EFFECT: improved precision of gyro; reduced requirements to errors in its production.
2 cl, 3 dwg
