SYSTEM FOR CONTROLLING TECHNOLOGICAL PROCESS FOR LASERS USED IN LITHOGRAPHY Russian patent published in 2005 - IPC

Abstract RU 2258253 C2

FIELD: control systems, for lasers in particular.

SUBSTANCE: each laser on each factory is connected to appropriate server of terminal, while at each factory server of central control node exchanges information with each laser through local network. Gathering of information from lasers is realized via server device of central control and this information is used for forming of total information, which is accessible for interested parties, which are allowed to view content of Web-server.

EFFECT: higher efficiency.

14 cl, 5 dwg, 2 tbl

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RU 2 258 253 C2

Authors

Pehjtl Partiv S.

Konvehj Dzhozef Eh.

Tantra Muldzhadi

Moehn Dzheffri V.

Karlesi Dzhejson R.

Grin Rodzher L.

Uotson Tom A.

Rouan Kristofer Dzh.

Dates

2005-08-10Published

2001-02-05Filed