FIELD: mechanical engineering.
SUBSTANCE: device has gas-permeable base which is dummy from one end and movable yoke that embraces the gas-permeable base made of a magneto-conducting metal. The sealing ring is set in the inner section of the yoke and secured to it by means of the metallic ring which is pressed to the sealing ring with the use of screws arranged over the periphery. The screws are screwed into the yoke that is made for movement from the initial position up to the stop at the plate of the table and flexible deformation of the sealing ring. The ring is sealed at the site where it is in a contact with the article, gas-permeable base, movable yoke, and metallic ring. The sealing ring is made of a flexible sealing material. The gas-permeable base is provided with the horizontal passage connected with the connecting pipe which is in communication with the evacuating device.
EFFECT: enhanced reliability.
4 cl, 4 dwg, 2 ex
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0 |
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SU1098747A1 |
Authors
Dates
2005-08-20—Published
2002-08-30—Filed