FIELD: electronic industry; building industry; transport; methods of production of protective electrically conducting and optically transparent coatings.
SUBSTANCE: the invention is pertaining to the method of production of the protective electrically conducting and optically transparent coatings, which may be used in electronic industry, transport, and also for realization of the energy-saving technology and in the building industry. The invention presents the method of production of the indicated coatings made on the base of indium oxide on the substrate out of the glass providing for the vacuum magnetron sputtering of the target based on indium and the coating deposition in the aerosphere of the mixture of the inert gas and oxygen on the preheated substrate. At that, first deposit an indium oxide layer of no more than 5-15 nanometers thick on the substrate, subject it to the thermal treatment at the temperature of 200-250°C during 20-30 minutes, then iterate the cycles of deposition of the indium oxide layers and their thermal treatment till obtaining the given depth of the coating. The invention offers the versions of the products made in the form of the protective optically transparent screens for the monitors with the factor of extinction of the spurious electromagnetic radiation of no less than 40 dB, in the form of the glass for the cars, the ships, the pilot cock-pits of the airplanes and in the form of the window glass. The technical result of the invention is an advantage of production of the optically transparent coatings with the electroconductivity of less than 3 Ohm/cm2 at the high strength and stability of its properties.
EFFECT: the invention ensures production of the optically transparent coatings with the low electroconductivity at the high strength and stability of its properties.
13 cl, 6 dwg, 5 ex
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Authors
Dates
2006-04-20—Published
2005-02-16—Filed