FIELD: optical technologies.
SUBSTANCE: invention relates to optical instrumentation, rocket, space, laser optics, quantum and optical nano- and microelectronics. An optical coating based on ITO films with deposited carbon nanotubes contains a layer of carbon nanotubes deposited using CO2 laser radiation on a substrate of conductive ITO material. One layer of carbon nanotubes is formed in the optical coating, while carbon nanotubes are embedded in the surface layer of the ITO film with the possibility of levelling the phase boundary: solid substrate-coating.
EFFECT: improved light transmission in the UV and visible region of the spectrum, increased mechanical and laser strength of optical coatings and optical elements of micro- and nanoelectronics.
1 cl, 3 dwg
Authors
Dates
2023-08-15—Published
2022-12-14—Filed