METHOD OF PREPARING OXIDE FILMS Russian patent published in 1998 - IPC

FIELD: conducting coatings. SUBSTANCE: invention relates to applying conducting coatings on optical instrumentation ware using vacuum evaporation of material. Method includes laser irradiation-mediated evaporation of metal oxide, deposition of evaporation products on a carrier, and heat treatment of deposited layer in oxygen atmosphere under its partial pressure 1•10³- 5•10^-5 mm Hg involving glow discharge-mediated oxygen ionization. Laser irradiation is conducted for 110-130 s in pulse mode with power 5•10⁵- 1•10⁶ W/sq.cm and pulse time 0.7-1 ms. EFFECT: intensified process. 1 dwg, 1 tbl