FIELD: electronic engineering.
SUBSTANCE: method of formation of nano-sized clusters and of creation of ordered structures of them is based upon introduction of solution, containing material for formation of clusters, into material of substrate and in subsequent influence of laser radiation pulse onto the solution till generation of low-temperature plasma in it. Restoration of material of cluster to pure material takes place as a result of crystallization of the solution onto liquid substrate during process of plasma cooling down. Single-crystal quantum points are formed in channels of nano-sized pores, which points are joined with material of substrate. Not only two-dimensional array of clusters but three-dimensional array of clusters can be produced. There is also capability of creation of joined clusters composed of different materials.
EFFECT: improved efficiency.
11 cl, 8 dwg
