METHOD OF CREATION OF MULTILAYERED NANOSTRUCTURE Russian patent published in 2013 - IPC H01L21/268 B82B3/00 B82Y40/00 

Abstract RU 2497230 C1

FIELD: nanotechnology.

SUBSTANCE: in the method of creation of a multilayered nanostructure, on one surface of the material transparent for laser radiation the diffraction grating is applied, and the material is affected with the pulse of laser radiation, the diffraction and multipath interference of the laser beam is induced at the surface of the diffraction grating in the area of the laser spot, multiple laser beams reflected from the diffraction grating are formed in this area, the local release of energy of the laser beam is sequentially caused in the points of their reflection from the diffraction grating, as well as melting of the material transparent for laser radiation, formation of crystallisation centers, explosive crystallisation of the material which is transparent for laser radiation on beams reflected from the diffraction grating after termination of action of the pulse of laser radiation, and simultaneously multiple spliced together layers of material transparent for laser radiation are created.

EFFECT: invention enables to create multilayered nanostructures of the many hundreds of layers during the period of a single pulse of laser radiation.

5 cl, 2 dwg

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RU 2 497 230 C1

Authors

Maksimovskij Sergej Nikolaevich

Radutskij Grigorij Avramovich

Firsov Evgenij Valentinovich

Dates

2013-10-27Published

2012-03-19Filed