FIELD: measuring technique.
SUBSTANCE: device comprises movable member, comb motor, capacitive pickups of movements of the movable mechanical member along the axis of the primary oscillations and output axis. The device has phase shifter made of a control device whose input is connected to the output of the capacitive pickup along the axis of the primary oscillations and demodulator whose first input is connected with the output of the capacitive pickup along the output axis and output is connected with the output of the low-frequency filter, and integrator. The input of the control of the phase shifter is connected with the output of the integrator whose input is connected with the output of the demodulator. The device can be additionally provided with summing amplifier, two multipliers and second phase shifter whose inputs are connected with the inputs of the first phase shifter and output, with the inputs of multipliers.
EFFECT: enhanced precision.
3 cl, 4 dwg
