FIELD: physics.
SUBSTANCE: invention relates to micromechanical gyroscopes (MMG). The vibration-type micromechanical gyroscope has capacitive motion sensors for a movable mechanical element on a primary oscillation axle, two pairs of electrodes on a secondary oscillation axle, one of which is a measuring electrode and the other a power electrode, a device for exciting primary oscillations connected between capacitive sensors on the primary oscillation axle and electrodes of a comb-drive, a differentiating element and series-connected phase changing unit, multiplier and low-pass filter. Between the output of the capacitive sensor on secondary oscillation axle and the pair of power electrodes on the secondary oscillation axle there is a quadrature suppressing device made in form of series-connected first multiplier, integrator and second multiplier. Between the output of the capacitive sensor on the secondary oscillation axle and the pair of power electrodes on the secondary oscillation axle there is a fixed-gain amplifier.
EFFECT: increased linearity and accuracy of the micromechanical gyroscope and widening of its frequency range.
2 cl, 2 dwg
Authors
Dates
2010-06-27—Published
2008-10-28—Filed