FIELD: micro-mechanics, in particular, vibration type micro-mechanical gyroscopes.
SUBSTANCE: in the method for adjusting resonance frequency of mobile mass suspension of micro-mechanical gyroscope along the secondary oscillation axis with deep negative check connection on basis of speed of movement of mobile mass along the secondary oscillation axis, signal is used which is proportional to force which compensates for quadrature interference. The phase of that signal in case of coincidence of resonance frequencies of suspensions along axes of primary and secondary oscillations is shifted for 90° relatively to signal of capacitive sensor along the axis of primary oscillations. To adjust frequency, average component of result of multiplication of mobile mass movement sensor signals along the axis of primary oscillations and signal, orthogonal to check connection signal, is determined, and generated voltage is used until resulting average component of multiplication result becomes equal to zero. Micro-mechanical gyroscope contains mobile mass on two-axial resonance suspension, two mobile mass movement capacitive sensors, additional electrodes, positioned along the axis of secondary oscillations, differentiating unit, demodulator, summing device, integrator and dividing device.
EFFECT: simplified design of micro-mechanical gyroscope and increased precision of adjustment of resonance frequency of mobile mass suspension of micro-mechanical gyroscope along the axis of secondary oscillations.
2 cl, 4 dwg
