METHOD AND DEVICE FOR NON-DESTRUCTIVE INSPECTION OF ELECTRO-PHYSICAL PARAMETERS OF THIN FLAT FILMS MADE OF NON-FERROUS IMPEDANCE OR CONDUCTING MATERIAL Russian patent published in 2006 - IPC G01R27/26 

FIELD: radio engineering measurements.

SUBSTANCE: method and device can be used for measurement of parameters of material in microwave range and millimeter wave range, in particular, for measurement of complex dielectric permeability and specific conductivity of film impedance materials and films made of non-ferrous conducting material. Non-destructive method of measurement is proposed which method is intended for measuring specific conductivity and complex dielectric permeability of films made of non-ferrous material, when thickness of films is shorter or comparable with depth of penetration of wave into material, used for making tested film, and of non-ferrous impedance material. Resonator with flat-parallel mirrors is proposed for the purpose. One mirror is used is tested material. Signal transmission coefficient through resonator is measured and then view of curve of transmission coefficient is restored while taking different losses into account. After that electro-physical parameters are calculated. Device for realization of the method is also proposed.

EFFECT: improved efficiency.

10 cl, 4 dwg