FIELD: air conditioning or ventilation.
SUBSTANCE: device comprises corner, column-like, and near-column exhaust panels for removing air from the near-floor zone of the clean room through the pressure-tight ceiling chamber by means of a recirculation fan. One portion of the removed air is directed back to the clean room and is mixed with the cleaned conditioned outdoor inflowing air, and the other portion of removed air is directed to the adjacent clean room and is removed by means of exhaust fan. The lowered static pressure in the intermediate zone with respect to the static pressure in the clean zone is provided by the fine filter mounted in the by-pass opening made in the baffle between the ceiling chamber of the clean room and intermediate zone. The forced air supplied to the clean room flows to the auxiliary rooms under the action of static pressure generated by the forced air through the ventilation valve-distributor. The forced air flows from the clean room to the auxiliary room through the intermediate room and unit of ventilation valve-distributors.
EFFECT: improved quality of air cleaning.
5 cl, 2 dwg
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Authors
Dates
2007-07-20—Published
2004-04-20—Filed