MICRO MECHANICAL GYROSCOPE Russian patent published in 2008 - IPC G01C19/56 G01P9/04 

FIELD: the invention refers to devices measuring an angular speed particularly to micro mechanical gyroscopes of vibratory type.

SUBSTANCE: the micro mechanical gyroscope has a foundation out of silicon with stators and a support installed on it through insulating layers. On the support there is a rotor suspended on it with the aid of torsion bars, a lid out of silicon with putted on it a silicon layer on which on which electrodes and an electronic block with a source of feeding are located. At that the signal outputs of the electric block are connected with the outputs of the stators, rotor and electrodes. Along the perimeter of the foundation and the lid there are metallization layers welded between themselves at assembling the gyroscope, the outputs of the stators, rotor and electrodes. Availability of an additional output of the metallization layer connected with the feeding source allows reduce impact of parasitical ties between the channels of excitation of primary vibration and transformation of the output channel.

EFFECT: improves measuring of an angular speed.

5 dwg