FIELD: electronics.
SUBSTANCE: invention is related to plants for electron-beam processing of items with welding, soldering or facing, namely to vacuum chambers. Vacuum chamber consists of vacuum-tight external and internal shells, which are installed one inside the other with creation of cavity between them. In cavity there are bulkheads installed, which are attached to walls of external shell. System of vacuum pumps is connected to working space of chamber internal shell. Cavity between chamber shells is made as leak-tight and is connected to system of vacuum pumps. At that bulkheads are installed with gap in respect to lateral and top walls of internal shell, the value of which is more than the value of bulkheads bending in the process of chamber operation.
EFFECT: provides elimination of chamber internal shell deformation; increases reliability and quality of plant operation.
2 cl, 3 dwg
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Authors
Dates
2008-07-10—Published
2006-07-20—Filed