FIELD: mechanics.
SUBSTANCE: vacuum chamber incorporates vacuum-dense inner and outer enclosures arranged one inside the other to forma space therein. The aforesaid space houses ribs jointed to the said outer enclosure. A system of vacuum pumps is connected to the chamber inner enclosure working space. The aforesaid space between the enclosures is isolated from atmosphere and communicates, via channels with, with the chamber inner enclosure working space. Note here that the aforesaid ribs are arranged with a gap relative to the enclosure side and top walls, the said gap size exceeding that of the ribs bend in operation.
EFFECT: higher reliability and quality.
2 cl, 3 dwg
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Authors
Dates
2008-11-27—Published
2006-07-20—Filed