FIELD: metrology.
SUBSTANCE: device represents a light-sensitive material specimen with holograms written thereon and forming a system of superimposed holograms. A reference laser beam acting on the specimen makes the system of holograms induce a response forming a plane fan of several beams originating at a time or in turns, one beam being generated by one hologram. In this version of the device, the reference beam and fan of diffracted beams originating in turns are located in one plane with the angles being reproduced on turning the specimen about its axis perpendicular to the said plane. In another version, the reference beam and the plane accommodating the diffracted beams fan are mutually perpendicular. The count of angles can be effected by turning the specimen through positions whereat one of the system hologram generates a response recorded by appropriate appliance.
EFFECT: higher accuracy and resolution of a circular scale being formed.
5 cl, 6 dwg
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Authors
Dates
2008-08-27—Published
2006-11-14—Filed