FIELD: instrument making.
SUBSTANCE: invention relates to instrument making and can be used in systems controlling moving mass in various-purpose micromechanical pickups. Proposed gyro comprises moving mechanical element, electric motor consisting of stator and rotor, capacitive transducer of mechanical element travel along primary oscillation axis, set of fixed electrodes making aforesaid capacitive transducer of moving mass travel about secondary oscillation axis and having the shape of sectors or sector parts located on dielectric layer substrate. Note that electrode sector angle ψ is selected to optimise relationship where C (α, ψ) is the dependence of capacitance upon moving electrode turn angle (useful component), CΣ is total parasitic capacitance which is the sum of TPC (ψ) below fixed electrode and parasitic capacitance Co of soldering out lead.
EFFECT: higher accuracy thanks to optimisation of turn angle pickup area.
3 dwg
Authors
Dates
2009-12-10—Published
2008-06-10—Filed