LASER LITHOGRAPHIC LIGHT SOURCE WITH BEAM TRANSMISSION Russian patent published in 2008 - IPC H01S3/02 H01S3/09 H01S3/97 

FIELD: physics; lighting.

SUBSTANCE: system of a very narrowband two-chamber gas-discharge laser with high repetition rate has two separate discharge chambers, one of which is part of the driving generator, generating a very narrowband transmitted beam, which, using a retransmitting optical system, is directed through the second discharge chamber for obtaining an amplified output beam. The system also consists of a beam transmission unit, containing a structure for limiting the path of the beam, forming a path for transmitting the laser beam to the laser input window on the lithographic device, and a system for measuring and controlling the laser beam, designed for measuring the pulse energy, wave length and band width of output laser pulses, generated by the two-chamber laser system, and controlling output laser pulses using a control circuit with feedback.

EFFECT: constant illumination of the plane of plate in the lithographic system for the whole period of its life span.

13 cl, 23 dwg