NARROW-BAND GAS-DOPED GAS LASER Russian patent published in 2004 - IPC

FIELD: laser engineering.

SUBSTANCE: proposed excimer laser designed for operation in narrow band at pulse repetition frequency of 500 - 2000 Hz has laser chamber made of material compatible with fluorine that accommodates two long electrodes, at least one preionizer, and working gas developing full pressure and composed of first inert gas, fluorine, buffer gas, and stabilizing dope that incorporates oxygen in the amount of minimum 10 million fractions or second, heavier, inert gas in the amount of up to 40 million fractions. Very narrow band of KrF laser is attained by reducing partial pressure of fluorine to below 0.10% and enhancing output coupler reflection to over 25%.

EFFECT: enhanced stability of laser energy.

31 cl, 20 dwg