FIELD: physics.
SUBSTANCE: invention can be applied for physical research and piezoelectric engineering in operating practice development of piezoelectric filming process, design and manufacture of high-frequency and superhigh frequency resonators and filters. Technical solution consists in antiresonant and resonant frequency measurement of formed compound cavity structures and additional measurement of difference between extreme frequencies at frequency dependences of electromagnetic wave reflectivity phase on the resonator. Thereafter K and Keff are calculated by formulas adequately describing electro-acoustic properties of structure.
EFFECT: ensured possibility to measure electromechanical coupling constant of layers and films of piezoelectric material being in acoustic contact to substrate plate, to measure effective electromechanical coupling constant of overtone resonators.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF MEASURING ELECTROMECHANICAL COUPLING CONSTANTS OF PIEZOELECTRIC MATERIAL | 2009 |
|
RU2421743C1 |
| MEASURING METHOD OF ATTENUATION FACTOR OF ACOUSTIC WAVES IN RESONANCE STRUCTURE AND ITS QUALITY | 2010 |
|
RU2477493C2 |
| MICROWAVE MASS SENSOR | 2019 |
|
RU2723956C1 |
| MULTIFREQUENCY RESONATOR ON VOLUME ACOUSTIC WAVES | 2013 |
|
RU2541927C2 |
| METHOD OF DETERMINATION OF ELASTIC SENSITIVITY OF S11E, S12E, S13E, S33E AND PIEZOELECTRIC MODULES D31, D33 ON ONE SAMPLE IN FORM OF DISC | 2016 |
|
RU2629927C1 |
| SENSOR, SYSTEM AND METHOD FOR MEASURING FLUID PROPERTIES USING MULTI-MODE QUASI - SHEAR - HORIZONTAL RESONATOR | 2009 |
|
RU2451287C2 |
| PIEZO-PACKAGE NON-DESTRUCTIVE TESTING METHOD | 2019 |
|
RU2730127C1 |
| PASSIVE WIRELESS ULTRAVIOLET RADIATION SENSOR ON SURFACE ACOUSTIC WAVES | 2018 |
|
RU2692832C1 |
| MAGNITOELECTRIC RESONATOR | 2010 |
|
RU2450427C2 |
| SURFACE ACOUSTIC WAVE RESONATOR | 2016 |
|
RU2633658C2 |
