FIELD: acoustics.
SUBSTANCE: invention relates to acoustic wave sensors, in particular to gravimetric sensors, and is the basis for creation of highly sensitive sensors of parameters of substance deposited on surface. Invention is a mass sensor based on microwave multifrequency resonator on volume acoustic waves in form of layered coplanar structure, which comprises a source of acoustic oscillations, which includes an upper metal electrode, a piezoelectric layer and a lower metal electrode, and an acoustic line from a synthetic monocrystal of diamond IIa type. At that, the acoustic oscillation source was made on one of the acoustic line surfaces, and the sensor zone was located on the opposite free surface of the acoustic line.
EFFECT: technical result is creation of high-sensitivity mass sensor, thickness and other physical and mechanical parameters of films of substance.
1 cl, 4 dwg
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