FIELD: physics.
SUBSTANCE: invention relates to measuring of parameters (thickness, structural state, electrophysical and thermophysical properties) especially hyperfine one-layer metal coats and the structural metal stratums superimposed on the dielectric warrants up-to-date high nanotechnologies. Heat eddy current method of the control of parameters of hyperfine metal coatings consists in the following: frequency of pulsing current is determined, quantity providing the peak degree of dependence to it checked thermophysical parameters λ=β2dx, the thermal generalised parameter accepted by the authors, in a range of λ=3÷5, determining optimum change of thermophysical properties of the coat material on temperature dependences Tmax(t), τmax and determine value of an initial backlash h between the plane of the exciting reel and coat plane according to expression (0.1-0.2)≤h/Rk≤0.5, providing optimum change of thermophysical properties of coat and value of thermal generalised parameter λ in a range λ=3÷5, and on target electrical signals of the heat eddy current transformer judge informative parametres of the coat material: the eddy current transformer - about thickness and electrophysical properties, thermal transformer - about thermophysical properties.
EFFECT: control method is improved.
2 dwg
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Authors
Dates
2009-04-10—Published
2007-08-16—Filed