METHOD FOR PREPARATION OF FIBER OPTIC WAVEGUIDE BLANK PARTS, DEVICE FOR ITS IMPLEMENTATION AND BLANK PART MADE THEREOF Russian patent published in 2009 - IPC C03B37/18 

FIELD: chemistry.

SUBSTANCE: method for preparation of fiber active waveguide by the precipitation of the oxynitride core alloyed with rare earth elements (REE) organo-metallic compound (OMC) or REE chlorides in reduced pressure microwave plasma created in quartz optically pure tube positioned in axial alignment with E₀₁₀ type resonator. The precipitation process is carried out on the inner surface of the tube by the way of round trip of resonator with plasma along the support tube. The quartz tube is evacuated up to working pressure 1-20 torr, the quartz reactor is under atmospheric pressure and filled with pure dry nitrogen without flow path. The microwave plasma is created in resonator around the support quartz tube; the round trip of resonator with plasma creates the reflective fluorosilicate envelope on the outer surface of the support tube. The method is implemented with E₀₁₀ type resonator device representing the quarter-wave resonator on the wave E₀₁. The tubular blank part is obtained, the said blank contains optically pure support tube which outer surface is covered by the way of outer lateral microwave plasmochemical precipitation with 1) oxynitride coating alloyed with REE and 2) reflective fluorosilicate envelope with outer surface coated with protective silicium oxynitride envelope.

EFFECT: providing of uniform precipitation of alloy additives and obtaining of sharp dopant profiles.

7 cl, 4 ex, 2 dwg