METHOD OF MAKING QUARTZ WORKPIECES OF FIBRE-OPTIC WAVEGUIDE, DEVICE FOR REALISING SAID METHOD AND WORKPIECE MADE USING SAID METHOD Russian patent published in 2010 - IPC C03B37/18 

FIELD: physics.

SUBSTANCE: invention relates to a method of making quartz workpieces of fibre-optic waveguides through lateral plasmochemical deposition of a reflecting fluorosilicate cladding from gas phase in low pressure microwave-discharge plasma onto the surface of a quartz rod. The microwave plasma around the rod is created by a resonator with oscillation mode H₀₁₁. Plasmochemical deposition is carried out using a device which has a microwave oscillator at 2.45 GHz, a waveguide transmission line with a H₀₁ wave and a H₀₁₁ oscillation mode resonator. Workpieces for making double-layer fibre-optic waveguides with numerical aperture in the range 0.22-0.55 are obtained.

EFFECT: invention enables to increase the diametre of the workpiece and rate of depositing quartz glass due to increase in the diametre of the quartz rod to 60-70 mm.

11 cl, 2 ex, 2 dwg