METHOD OF ANODE FOIL OBTAINMENT Russian patent published in 2010 - IPC C23C14/28 C23C14/58 H01G9/45 

FIELD: metallurgy.

SUBSTANCE: invention refers to electronics, particularly to methods of manufacturing of anode foil applicable in solid-state electrolytic condensers with conductive polymer electrolyte. Method involves application of porous layer of valve metal nitride onto both sides of aluminium foil in vacuum chamber, and further oxidation of obtained layer in vacuum chamber with continuous movement of aluminium foil. Valve metal nitride layer is applied by electron-beam evaporation of metal in nitrogen atmosphere or in nitrogen mix with inert gases. Further oxidation of obtained layer is performed in steady-state or impulse magnetron discharge plasma and/or high-frequency discharge plasma of 10⁹ - 10¹⁵ cm^-3 density.

EFFECT: environmentally safe and simple method of obtaining anode foil with high specific capacity.

2 cl, 3 dwg 1 ex