FIELD: chemistry.
SUBSTANCE: invention can be used in microelectronics industry. To obtain zirconium titanates, zirconium compounds react with titanium dioxide particles, having BET specific surface area greater than 200 m2/g. To obtain lead-zirconium titanates, lead and zirconium compounds react with titanium dioxide particles with BET specific surface area greater than 200 m2/g. Content of halides in the titanium dioxide particles used is less than 1000 parts per million in terms of TiO2. The lead-zirconium titanates are ground and then pressed to form green moulds or processed into a film, after which they are sintered to obtain microelectronic articles.
EFFECT: invention enables to obtain finely dispersed, well sintered zirconium titanates or lead-zirconium titanates.
47 cl, 11 ex
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Authors
Dates
2011-03-27—Published
2005-12-13—Filed