FIELD: physics.
SUBSTANCE: apparatus has a lens, a test object in the focal plane of the lens, an illumination system comprising a light source and a condenser, an optical unit lying in front of the lens and having two channels - sighting and laser channels, and a recording unit consisting of a diaphragm unit and an optical unit behind which there is a radiant energy receiver. The optical unit is in form of a rhombus-prism, AP-90° attached to the prism, and two wedges, mutual turning of which provides coaxiality of the sighting and laser channels with the optical axis of the lens. The test object is a grid deposited on a glass plane-parallel plane and having transparent areas - strips and circles on an opaque background. The diaphragm unit is in form of a mask which is an opaque disc with transparent areas. The optical unit has a single converging lens and a beam-splitter prism which turns the beam path in the recording unit to the radiant energy receiver by 90°. The mask, single lens and beam-splitter prism of the optical unit are also elements of the illumination system.
EFFECT: high measurement accuracy and therefore high accuracy of controlling the test object, simple design and low labour input in manufacturing.
7 cl, 3 dwg
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Authors
Dates
2011-05-20—Published
2009-12-30—Filed